Silicon integrated accelerometer
US6683358B1 · kind B1 · utility
15Cited by
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9Claims
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Key dates
| Filing date | May 10, 2000 |
| Grant date | Jan 27, 2004 |
| Priority date | — |
| Expiry date | May 10, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an accelerometer, the stress is detected through electric amplification with the use of detecting elements 411-434 having an amplification function arranged on beams 3 and, with the use of a differential amplifier circuits 510 formed on the support base 1, an acceleration component in a detection axis direction to which the stress is applied is outputted as the differential mode and acceleration components in the other axis directions are outputted as the common mode, so that each axis sensitivity ratio between the detection axis sensitivity and the other axis sensitivities is enhanced largely.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.