Solid immersion lens array and methods for producing and using solid immersion lens array with fiducial marks
US6683723B2 · kind B2 · utility
6Cited by
13References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2002 |
| Grant date | Jan 27, 2004 |
| Priority date | — |
| Expiry date | Jun 27, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/32
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A near field solid immersion lens array, method of using, and making a near field solid immersion lens array. A cover slide is provided having a near field solid optical lens array having least one fiducial mark. The fiducial mark is used by a positioning device for locating the position of each of the lens in the array. A unique identifier may be provided for locating information of the position of each lens in the array that can be used for driving the positioning device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.