Solid immersion lens array and methods for producing a solid immersion lens array
US6683724B2 · kind B2 · utility
2Cited by
11References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2002 |
| Grant date | Jan 27, 2004 |
| Priority date | — |
| Expiry date | Jun 13, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B3/0056
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A solid immersion lens device and method of making. A solid immersion lens device is provided having a plurality of solid immersion lenses. The solid immersion lenses are provided in a predetermined pattern and secured so as to cause them to be in a fixed position with respect to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.