Micromachined devices
US6684698B2 · kind B2 · utility
3Cited by
31References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 14, 2002 |
| Grant date | Feb 3, 2004 |
| Priority date | — |
| Expiry date | Nov 14, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined device has a body suspended over a substrate and movable in a plane relative to the substrate. The body has a perimeter portion, a first cross-piece portion extending from one part of the perimeter portion to another part of the perimeter portion to define at least first and second apertures, a first plurality of fingers extending along parallel axes from the perimeter portion into the first aperture, and a second plurality of fingers extending along parallel axes from the perimeter portion into the second aperture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.