Flextensional transducer and method of forming a flextensional transducer
US6685302B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2002 |
| Grant date | Feb 3, 2004 |
| Priority date | — |
| Expiry date | Jan 30, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/15
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A flextensional transducer includes a substrate having an etch stop layer interposed between a first layer and a second layer, a flexible membrane supported by the second layer of the substrate and having an orifice defined therein, and an actuator provided on the flexible membrane and adapted to deflect the flexible membrane. The substrate has an opening formed through the first layer and a hole formed through the etch stop layer and the second layer such that the hole through the etch stop layer and the second layer of the substrate communicates with the opening through the first layer of the substrate and the orifice in the flexible membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.