Method of fabricating capillary discharge plasma display panel using lift-off process
US6685523B2 · kind B2 · utility
7Cited by
7References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2001 |
| Grant date | Feb 3, 2004 |
| Priority date | — |
| Expiry date | Sep 13, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J11/38
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for fabricating a PDP is disclosed. The method for fabricating a PDP including the steps of preparing first and second panels for connecting with each other, forming at least one electrode on the first panel, forming a dielectric layer of PbO on the first panel, sequentially forming Cr and Ni on the PbO layer as a mask material of the PbO layer, performing photolithography and lift-off processes on the Ni/Cr layers to form a mask pattern of Ni/Cr, and etching the PbO layer using the mask pattern of Ni/Cr to form at least one capillary tube within the PbO layer to expose the electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.