Low-vacuum scanning electron microscope
US6686590B2 · kind B2 · utility
2Cited by
3References
9Claims
0Family size
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Key dates
| Filing date | Mar 25, 2002 |
| Grant date | Feb 3, 2004 |
| Priority date | — |
| Expiry date | Mar 25, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2608
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is disclosed a low-vacuum scanning electron microscope wherein a bias voltage is applied to a specimen. A primary electron beam is made to strike the specimen, producing secondary electrons which are accelerated by an electric field producing an electron avalanche effect. Positive ions traveling toward the specimen reach the specimen or specimen holder. Then, the electrons lose their electric charge and return to molecules. In this way, a scanned image corresponding to a secondary electron image can be obtained based on the specimen current.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.