Time base comprising an integrated micromechanical ring resonator

US6686807B1 · kind B1 · utility

Assignee

• Eta SA Fabriques d'Ebauches · CH

Inventors

• Metin Giousouf · Eßlingen, DE
• Heinz Kück · Stuttgart, DE
• Rainer Platz · Neuchâtel, CH

Key dates

• Filing date: May 2, 2002
• Grant date: Feb 3, 2004
• Expiry date: May 17, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H03B5/30
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A time base having a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator (4) supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator has a central post (5) extending from the substrate along the axis of rotation, and a free-standing oscillating structure (6) including an outer ring (60) coaxial with the axis of rotation, and a plurality of spring elements (62) disposed symmetrically around the central post and connecting the outer ring to the central post.