Liquid discharge head substrate, liquid discharge head, liquid discharge apparatus having these elements, manufacturing method of liquid discharge head, and driving method of the same
US6688729B1 · kind B1 · utility
25Cited by
19References
13Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 1, 2000 |
| Grant date | Feb 10, 2004 |
| Priority date | — |
| Expiry date | Jun 1, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14354
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A liquid discharge head substrate used for a liquid discharge head adapted to discharge liquid by applying discharge energy to the liquid includes a semiconductor substrate provided with an energy conversion element for converting electric energy into discharge energy. The semiconductor substrate is further provided with a function element made of a ferroelectric material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.