Liquid coating composition for production of fluorine doped tin oxide thin layers suitable for chemical vapor deposition process
US6689203B2 · kind B2 · utility
0Cited by
1References
20Claims
0Family size
Inventor
Key dates
| Filing date | May 15, 2002 |
| Grant date | Feb 10, 2004 |
| Priority date | — |
| Expiry date | May 15, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/407
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Composition containing a chlorinated organotin derivative and a polyfluoroalkenyl compound and/or a halo polyfluoroalkenyl compound useful for CVD formation of fluorine doped tin oxide coatings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.