Method for electrochemically processing material
US6689269B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 26, 2001 |
| Grant date | Feb 10, 2004 |
| Priority date | — |
| Expiry date | Jun 26, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23H3/02
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The invention relates to a method for electrochemically processing a workpiece (61) in which a pulsating or alternating electrical voltage is applied between the workpiece and a workpiece electrode (62) which are arranged at a distance from one another in an electrolyte. A distance range is defined by precisely dimensioning the mean value of the applied pulsating voltage and of the voltage amplitudes measured with regard to this mean value. A double layer charge reversal on the workpiece which is sufficient for bringing about the desired electrochemical reaction results within said distance range, whereas workpiece areas situated at further distances do not experience a sufficient double layer charge reversal. The dimensions of the space between the workpiece and the workpiece electrode are proportioned in such a way that only points of the area of the workpiece to be processed lie within said distance range. As a result, it is possible to attain a spatial resolution that could not be obtained until now during the production of the smallest three-dimensional structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.