Method of fabricating near-field light-generating element
US6689545B2 · kind B2 · utility
4Cited by
2References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 15, 2002 |
| Grant date | Feb 10, 2004 |
| Priority date | — |
| Expiry date | Jul 15, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q80/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of fabricating a near-field light-generating element having a minute scattering body inside an aperture, the scattering body producing plasmons by being illuminated with light, includes a step of forming minute scattering bodies periodically arranged on a substrate, a step of selecting the periodically arranged minute scattering bodies except for only one minute scattering body, and a step of forming the aperture such that the single minute scattering body is placed inside the aperture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.