On-board microelectromechanical system (MEMS) sensing device for power semiconductors
US6690178B2 · kind B2 · utility
16Cited by
82References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2001 |
| Grant date | Feb 10, 2004 |
| Priority date | — |
| Expiry date | Feb 2, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/19041
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An on-board micro-electromechanical (MEMS) isolator is provided on board a power semiconductor device for measuring voltage, current, or both. In particular, the power semiconductor may comprise a plurality of transistors connected in parallel, such that a MEMS isolator connected in parallel with one of the transistors measures voltage across the semiconductor. A MEMS isolator may further be connected in series with the transistors to measure current flow thereacross. A compensation circuitry may be provided to receive the current output from the isolator, and determine total current flow through the power semiconductor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.