Capacitive sensor
US6690569B1 · kind B1 · utility
63Cited by
13References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 3, 2002 |
| Grant date | Feb 10, 2004 |
| Priority date | — |
| Expiry date | Sep 3, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/225
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor, in particular a humidity sensor, comprises a measuring layer (4), the dielectric properties of which depend on a parameter to be measured, e.g. of the humidity of the environmental air. Electrodes (2, 3) are arranged on a substrate (1) side by side for capacitively measuring the measuring layer (1). A protective layer (8) of a non-oxidizing material, in particular a layer of silicon oxide or gold, is arranged between the electrodes (2, 3) and the measuring layer (4). This layer prevents an oxidation of the electrodes (2, 3) and increases the live time and reliability of the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.