Single self-aligned carbon containing tips
US6692324B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2001 |
| Grant date | Feb 17, 2004 |
| Priority date | — |
| Expiry date | Jul 2, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/891
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Systems and methods are described for a single self-aligned carbon nanofiber emitters within a dielectric well. A method, includes: providing a substrate; defining lithographically a catalyst particle, the catalyst particle coupled to the substrate; depositing a dielectric layer, the dielectric layer coupled to the substrate; depositing an extractor layer, the extractor layer coupled to the dielectric layer; forming an extractor aperture in the extractor layer; forming a dielectric well in the dielectric layer to uncover the catalyst particle; and then fabricating at a location of the catalyst particle and within the dielectric well a single self-aligned carbon containing tip i) having a base located substantially at the bottom of the dielectric well and ii) extending substantially away from the substrate using plasma enhanced chemical vapor deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.