High purity fluoropolymers

US6693164B2 · kind B2 · utility

Assignee

• 3M INNOVATIVE PROPERTIES COMPANY · US

Inventors

• Thomas J. Blong · Woodbury, US
• Denis Duchesne · Woodbury, US
• Gernot Loehr · Altötting, DE
• Albert Killich · Altötting, DE
• Tilman C. Zipplies · Burghausen, DE
• Ralph Kaulbach · Emmerting, DE
• Herbert Strasser · Altötting, DE

Key dates

• Filing date: May 23, 2001
• Grant date: Feb 17, 2004
• Expiry date: Jun 28, 2021

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C08F6/22
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

The invention relates to high purity fluoropolymers and processes for making such materials. These polymers are particularly suited for applications in the semiconductor industry. The process comprises removal of unstable polymer end groups by fluorination and removal of heavy metal impurities by extraction with an aqueous acid medium.