Flow controller
US6694809B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2002 |
| Grant date | Feb 24, 2004 |
| Priority date | — |
| Expiry date | Feb 28, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A flow controller is provided for delivering a precise volume of fluid such as high purity fluid streams to a processing destination, such as a wafer processing chamber. The flow controller includes a base with a seamless slot formed in a face thereof, providing a predictable pressure drop. The seamless slot is in fluidic communication with a sensor channel extending downwardly from the seamless slot first having temperature sensors thereon for inferring the mass flow through the flow controller. A valve is in fluidic communication with the seamless slot and is operably connected to the temperature sensors such that the valve opening is adjusted until the mass flow inferred by the temperature sensors is equal to a desired mass flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.