Patent · US Expired

Fiber optics systems for high purity pump diagnostics

US6695593B1 · kind B1 · utility

37Cited by
28References
31Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 11, 2002
Grant dateFeb 24, 2004
Priority date
Expiry dateSep 3, 2022

Classification

  • Technology area (CPC F)Mechanical Engineering; Lighting; Heating
  • CPC primaryF04B2201/0605
  • WIPO fieldEngines, pumps, turbines
  • WIPO sectorMechanical engineering

Abstract

A pump for ultra-pure fluids comprises a flexible diaphragm separating a fluid chamber from an air chamber. The diaphragm creates an airtight seal between the fluid chamber and the air chamber. Any leak from the fluid chamber into the air chamber is detected by a fiber optic system comprising an element and two optical fibers that are disposed such that light is detected by the second optical fiber only when the element is not in contact with liquid. A second fiber optic system can also be used to determine the stroke of an oscillating member by disposing the fiber optic lines at an angle calculated to reflect light off of the oscillating member when the member arrives at a predetermined location. The fiber optics are adapted to be resistant to corrosion, non-igniting, and non-contaminating.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.