Diamond-like glass thin films
US6696157B1 · kind B1 · utility
90Cited by
26References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 5, 2000 |
| Grant date | Feb 24, 2004 |
| Priority date | — |
| Expiry date | Mar 5, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A diamond-like glass film is disclosed. In specific implementations, the film includes a diamond-like glass containing at least about 30 atomic percent carbon, at least about 25 atomic percent silicon, and less than or equal to about 45 atomic percent oxygen on a hydrogen-free basis. The diamond-like glass film may be applied to various substrates. The invention is also directed to articles having a diamond-like glass film, methods of making the articles, and apparatus for making the film and to articles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.