Microgyro tuning using focused ion beams

US6698287B2 · kind B2 · utility

Assignees

• The Boeing Company · US
• The Regents of the University of California · US

Inventors

• Randall L. Kubena · Agoura, US
• Richard J. Joyce · Thousand Oaks, US
• Robert M'Closkey · Los Angeles, US
• A. Dorian Challoner · Manhattan Beach, US

Key dates

• Filing date: Nov 1, 2002
• Grant date: Mar 2, 2004
• Expiry date: Nov 1, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/084
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present invention discloses methods of manufacturing mechanical resonator microgyroscopes using focused ion beam machining and the mechanical resonator gyroscopes produced therefrom. An exemplary method of tuning a mechanical resonator gyroscope, includes the steps of mounting a mechanical resonator gyroscope in a vacuum chamber with a controllable focused ion beam where the gyroscope includes exciting and sensing elements for measuring a resonant frequency of the gyroscope. The exciting and sensing elements are activated to measure the resonant frequency of the mechanical resonator gyroscope and the resonant frequency of the gyroscope is adjusted to a desired resonant frequency value by controlling the focused ion beam to remove material of the gyroscope.