Pressure cell with temperature sensors and pressure measuring method

US6698294B2 · kind B2 · utility

Assignee

• VEGA Grieshaber KG · DE

Inventors

• Joern Jacob · Kirnbach, DE
• Ewald Boehler · Furtwangen, DE

Key dates

• Filing date: Jul 31, 2001
• Grant date: Mar 2, 2004
• Expiry date: Jul 31, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/125
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure cell contains a base body (1), a membrane (2) that is arranged on the base body (1) and can be deformed by a pressure to be measured, as well as a first and a second temperature sensor. The second temperature sensor is spaced apart from the first temperature sensor in the direction of a temperature gradient. Temperature shocks of the measuring cell can be determined and compensated by monitoring the difference between the temperatures measured by the sensors or changes in the temperatures measured by a sensor.