Triaxial probe assembly

US6700397B2 · kind B2 · utility

Assignee

• The Micromanipulator Company, LLC · US

Inventors

• Kenneth F. Hollman · Carson City, US
• Robert D. Hancock · Longview, US
• Daniel E. Smith · Erie, US

Key dates

• Filing date: Mar 23, 2001
• Grant date: Mar 2, 2004
• Expiry date: Mar 23, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2889
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a probe assembly for a wafer probe station having a probe holder and a replaceable probe tip. The probe holder is triaxially configured with a laterally extending center signal conductor, an intermediate guard conductor extending along the length of the center conductor and spaced radially therefrom by a tubular insulator member, and an outer shield member extending along a portion of the guard conductor and spaced radially therefrom by a second tubular insulator member. A coaxially configured probe tip has a center conductor extending to a probe point and a guard conductor radially spaced from the center conductor by an intermediate insulator. A releasable connection provides a rigid attachment between the probe tip and the probe holder and provides electrical interfaces between the center and guard conductors thereof. The probe assembly provides a replaceable probe tip solution having a rigid design and the ability to guard the center conductor along its length to a distance very near the probe point to provide enhanced performance in low current and low voltage measurement applications.