Method and apparatus for circuit pattern inspection
US6700658B2 · kind B2 · utility
14Cited by
31References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 5, 2001 |
| Grant date | Mar 2, 2004 |
| Priority date | — |
| Expiry date | Apr 24, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95684
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention captures images of a circuit chip with a time delay integration or TDI sensor. The circuit chip is on a movable stage which moves at the same rate at which the TDI sensor clocks. A pulsed laser is directed toward the circuit chip and activated in synchronisation with the clock rate of the TDI sensor such that laser is activated when the TDI sensor is imaging the object and the laser is deactivated when the TDI sensor is transferring its charge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.