Air-gap optical structure having the air gap defined by a layered spacer structure
US6704145B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2002 |
| Grant date | Mar 9, 2004 |
| Priority date | — |
| Expiry date | Sep 4, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/1805
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An air-gap optical structure is fabricated by depositing a metallic spacer structure on a first transmissive optical element, and then contacting a second transmissive optical element to the spacer structure so that the spacer structure lies between the first transmissive optical element and the second transmissive optical element and defines an air gap therebetween. A first layer of the spacer structure contacts the first transmissive optical element, and a second layer of the spacer structure contacts the first layer. The first layer is preferably deposited by vapor deposition and is relatively thin, and the second layer is preferably electroless deposited and is relatively thick. The total thickness of the spacer structure is typically from about 5 to about 15 micrometers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.