Mirror for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor
US6704475B2 · kind B2 · utility
26Cited by
12References
38Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Apr 3, 2001 |
| Grant date | Mar 9, 2004 |
| Priority date | — |
| Expiry date | Aug 15, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3594
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A mirror, or an array of mirrors, for use in a micro-electro-mechanical system (MEMS) optical device. The mirror includes a mirror substrate having a loss-reducing layer located over a first or second side thereof, and a light reflective optical layer located over the loss-reducing layer. The inventive mirror reduces undesirable Fabry-Perot interferrometric optical loss through minimizing the extent of multiple reflections within the MEMS mirror substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.