Patent · US Expired

Optical MEMS switch with imaging system

US6704476B2 · kind B2 · utility

20Cited by
22References
28Claims
0Family size

Assignees

Inventors

Key dates

Filing dateJun 29, 2001
Grant dateMar 9, 2004
Priority date
Expiry dateJun 29, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/43
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

In an all optical switch an imaging system is interposed between the micro lens array and the moveable micro mirrors of a MEMS device to which, or from which, the light beams are directed. This causes an image of the micro lens array to be formed at the MEMS device, or vice-versa, thus effectively eliminating the distance between the micro lens array and the MEMS device. The imaging system may be a telecentric system. The size of the arrangement may be reduced by compacting the optical path, e.g., using appropriate conventional mirrors, and/or employing folded arrangements, i.e., arrangements in which there is only one MEMS device stage that does double duty for both input and output through the use of at least one conventional mirror. The overall system is arranged to account for any inversions introduced.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.