Nanostructured ceramic platform for micromachined devices and device arrays
US6705152B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2001 |
| Grant date | Mar 16, 2004 |
| Priority date | — |
| Expiry date | Oct 24, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2982
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention discloses a type of nanostructured ceramic platform for gas sensors and sensor arrays. These sensors comprise micromachined anodic aluminum oxide films, which contains extremely high density (e.g., 1011 cm−2) nanoscale pores. Sensing materials deposited inside this self-organized network of nanopores have ultra-high surface area and nanometer grain structure, therefore enabling high sensitivity. Refractory nature of alumina ceramic enables the desired robustness, long lifetime and stability in harsh environment. This sensor platform can been used for both chemical gas and physical (humidity, temperature) sensors and sensor arrays.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.