Transport device and method of transporting to-be-processed elements through a high-temperature zone

US6705457B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• Centrotherm Elektrische Anlagen GmbH & Co. · DE

Inventors

• Daniel Biro · Glückstadt, DE
• Reinhard Lenz · Blaubeuren, DE
• Peter Völk · Dresden, DE
• Gernot Wandel · Blaubeuren, DE

Key dates

• Filing date: Apr 1, 2002
• Grant date: Mar 16, 2004
• Expiry date: Apr 1, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/677
• WIPO field: Handling
• WIPO sector: Mechanical engineering

Abstract

A transport device for transporting to-be-processed elements through a high-temperature zone and a corresponding method is described. The transport device operates according to the walking beam principle, with thin, elongated carrier elements made of a flexible material, which are maintained under tensile stress along the longitudinal axis of the carrier elements, being provided instead of conventional walking beams. The device permits low contamination transport of the elements through a high-temperature zone and improved utilization of energy as well as the ability to use a RTP process.