Method for shaped optical MEMS components with stressed thin films
US6706202B1 · kind B1 · utility
9Cited by
9References
10Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 28, 2000 |
| Grant date | Mar 16, 2004 |
| Priority date | — |
| Expiry date | Sep 28, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/017
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method is disclosed for making shaped optical moems components with stressed thin films. In particular, stressed thin films are used to make mirror structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.