Spray member and method for using the same
US6706641B2 · kind B2 · utility
6Cited by
26References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 13, 2001 |
| Grant date | Mar 16, 2004 |
| Priority date | — |
| Expiry date | Oct 12, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67051
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process chamber assembly for use with a substrate and a flow of process fluid includes a vessel and a spray member. The vessel defines a chamber. The spray member includes at least one spray port formed therein adapted to distribute the flow of process fluid onto the substrate in the chamber. The spray member is operative to rotate about a rotational axis relative to the vessel responsive to a flow of the process fluid out of the spray member through the at least one spray port.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.