Selective ionic implantation of fluoropolymer film to modify the sensitivity of underlying sensing capacitors
US6707093B2 · kind B2 · utility
3Cited by
7References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 30, 2001 |
| Grant date | Mar 16, 2004 |
| Priority date | — |
| Expiry date | Jan 18, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3025
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A touch-sensitive semiconductor chip having a physical interface to the environment, where the surface of the physical interface is coated with a fluorocarbon polymer. The polymer is highly scratch resistant and has a characteristic low dielectric constant for providing a low attenuation to electric fields. The polymer can be used instead of conventional passivation layers, thereby allowing a thin, low dielectric constant layer between the object touching the physical interface, and the capacitive sensing circuits underlying the polymer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.