Tunable MEMS resonator and method for tuning
US6707351B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 27, 2002 |
| Grant date | Mar 16, 2004 |
| Priority date | — |
| Expiry date | Apr 27, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H3/0077
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
MEMS resonators (100, 400, 500) include a source of material that is capable of sublimation (128, 130, 406, 408, 502, 504). Conductive pathways (132, 134, 402, 404, 502, 504) to the material are used to supply current of ohmically heat the material in order to cause the material to sublimate. The material may be located either on or in close proximity to a resonant member (114) of the resonator. By sublimating the material, the mass of the resonant member is either increased or decreased thereby altering the resonant frequency of the resonant member. The resonant member is preferably located in a recess that is capped by a cap (202) forming a vacuum enclosure, and the material capable of sublimation preferably comprises a material that serves to getter any residual gases in the vacuum enclosure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.