Reducing the susceptibility of titanium nitride optical layers to crack
US6707610B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 20, 2002 |
| Grant date | Mar 16, 2004 |
| Priority date | — |
| Expiry date | Sep 20, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In a titanium nitride-based optical coating, the structural stability of the coating is enhanced by providing a damage-retardation base layer between the titanium nitride layer and a substrate. Where the optical coating is to provide solar control, the titanium nitride layer is selected primarily for achieving desired optical characteristics, while the thickness of the damage-retardation layer is selected primarily for achieving desired mechanical characteristics. The damage-retardation layer is formed of a grey metal, with nickel chromium being the preferred metal. The grey metal layer reduces the likelihood that the titanium nitride layer will crack. The tendency of such a layer to crack and form worm tracks is further reduced by exposing the substrate to a plasma preglow and/or by using a slip agent on the side of the substrate on which the layers are to be formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.