System identification to improve control of a micro-electro-mechanical mirror
US6708082B2 · kind B2 · utility
3Cited by
4References
16Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 3, 2002 |
| Grant date | Mar 16, 2004 |
| Priority date | — |
| Expiry date | Jun 3, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of adjusting a MEMS mirror control system is provided to calibrate a MEMS mirror control system to a particular MEMS mirror in a fashion that optimizes MEMS mirror control loop performance. This calibration is implemented by measuring the gain and resonant frequency of the particular MEMS mirror, and adjusting one or more of the parameters used in the implementation of a PID controller, a state estimator, and a feed forward component used to perform seeks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.