Device, computer program product and method for indicating a function deviation of one or more details of manufacturing equipment using frequency component analysis
US6708128B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2002 |
| Grant date | Mar 16, 2004 |
| Priority date | — |
| Expiry date | May 31, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/263
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device, method and computer program product are disclosed for indicating a function deviation of one or more details of manufacturing equipment using frequency component analysis for analyzing deviations between a nominal product shape and an actual product shape of a product using surface data of a physical surface, the product having been processed by the manufacturing equipment. The analysis can be based on the surface data and a set of function deviation indicating frequencies corresponding to frequencies at which function deviations occur in the one or more details. The function deviation indicating frequencies can be comprised in a frequency map. A method of configuring a frequency map is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.