Microsystems integrated testing and characterization system and method
US6708132B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 23, 2001 |
| Grant date | Mar 16, 2004 |
| Priority date | — |
| Expiry date | Mar 17, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C99/005
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An improved microsystems testing and characterization system which allows the system user to identify specific structures, and thereby to initiate an automated testing sequence to be applied to that structure or a series of structures. The integrated control system that governs the present invention automates the power supply to the device under test, the precision motion control of all components, the sensor operation, data processing and data presentation. Therefore operation is autonomous once the microstructure is in place and the testing sequence is specified. The integrated testing system can be used to perform tests on an entire wafer or on a single die.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.