Direct acting vertical thermal actuator
US6708491B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2000 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | Jul 4, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2061/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A micrometer sized, single-stage, vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. A member mechanically and electrically couples the free ends of the hot and cold arms such that the member moves away from the substrate when current is applied to at least the hot arm. The hot arm can optionally include a grounding tab to minimize thermal expansion of the cold arm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.