Ink-jet head, method of manufacture thereof, and ink-jet printer
US6709089B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 29, 2002 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | Apr 29, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/21
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An ink-jet head, a manufacturing method thereof, and an ink-jet recording apparatus, in which a substrate low in price, easy to handle and large in size can be used to thereby improve the productivity. Individual electrodes (101) are formed on an electrode glass substrate (100), and covered with an insulating film (202). A sacrificial layer (110) is formed on the insulating film (202), and diaphragms (201) are formed thereon. Window portions (212) are provided in support portions of the diaphragms (201). The sacrificial layer (110) is etched through the window portions (212) to thereby form an electrostatic actuator structure. After that, to close the window portions (212), Ni is deposited all over the surface again, and thereafter the Ni film is patterned to thereby form partition base portions (213). Cavity partitions (214) are formed by Ni electrocasting, and a nozzle plate (300) is bonded therewith.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.