Adsorbent for moisture removal from fluorine-containing fluids
US6709487B1 · kind B1 · utility
4Cited by
17References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2002 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | Oct 22, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S95/90
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An adsorbent, method, and apparatus involving same for the removal of moisture from a fluoride-containing fluid such as gaseous nitrogen trifluoride are disclosed herein. In certain preferred embodiments, the adsorbent of the present invention comprises an organic support having a porosity of 30% or greater and a pore size of 2 &mgr;m or less; and at least one metal fluoride disposed within at least a portion of the organic substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.