Method for a tray exchange during continuous production of disks
US6709701B2 · kind B2 · utility
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2References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2002 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | Sep 6, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/56
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of exchanging a thin film coated tray (30) for a clean tray (30) is provided. The method replaces the tray (30) at an intermediate position on the handler (10) and not at an intermediate disk loading position of the rotating disk loading mechanism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.