Apparatus for sensing electromagnetic radiation
US6710348B1 · kind B1 · utility
4Cited by
5References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 2001 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | May 2, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for sensing electromagnetic radiation with local resolution for image-producing sensors that can be economically produced and installed is decribed. This is achieved, in that a micromechanically producible optical imaging system is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.