Thin film bulk acoustic resonator (FBAR) and inductor on a monolithic substrate and method of fabricating the same
US6710681B2 · kind B2 · utility
95Cited by
15References
13Claims
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Key dates
| Filing date | Jul 13, 2001 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | Jul 13, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An apparatus having both a resonator and an inductor fabricated on a single substrate and a method of fabricating the apparatus are disclosed. The apparatus includes a resonator and an inductor that is connected to the resonator. Both the resonator and the inductor are fabricated over their respective cavities to produce a high Q-factor filter circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.