Controlling micro-electro-mechanical cavities
US6710908B2 · kind B2 · utility
663Cited by
70References
29Claims
0Family size
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Key dates
| Filing date | Feb 13, 2002 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | Feb 13, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2203/03
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Among other things, a cavity having a cavity dimension is configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, and at least two electrical structures are configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.