Method and apparatus for generating X-ray or EUV radiation
US6711233B2 · kind B2 · utility
21Cited by
10References
44Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 23, 2001 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | May 12, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2235/082
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a method and an apparatus for generating X-ray or EUV radiation, an electron beam is brought to interact with a propagating target jet, typically in a vacuum chamber. The target jet is formed by urging a liquid substance under pressure through an outlet opening. Hard X-ray radiation may be generated by converting the electron-beam energy to Bremsstrahlung and characteristic line emission, essentially without heating the jet to a plasma-forming temperature. Soft X-ray or EUV radiation may be generated by the electron beam heating the jet to a plasma-forming temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.