X-ray inspection apparatus and method
US6711235B2 · kind B2 · utility
21Cited by
19References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 31, 2002 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | May 31, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/316
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An X-ray inspection system is provided having an X-ray source and first and second collimators. The first and second collimators are arranged in relation to the source and the target such that the portion of the target actually illuminated by The X-ray beam is substantially equal to the size of a selected inspection zone.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.