Patent · US Expired

Optical switch based on rotating vertical micro-mirror

US6711318B2 · kind B2 · utility

8Cited by
60References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 29, 2001
Grant dateMar 23, 2004
Priority date
Expiry dateAug 10, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/358
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A MEMS-based device to steer and manipulate beams of light traveling in free-space in an optical switch. The optical switch is based on a rotating vertical micro-mirror constructed on a surface of a substrate. At least one input optical fiber is arranged to direct at least one optical signal through free-space along a first optical path parallel to the surface of the substrate. A plurality of output optical fibers are arranged to receive the optical signal traveling through free-space along other optical paths not co-linear with the first optical path. At least one substantially vertical, rotating micro-mirror assembly is constructed on the substrate. The assembly includes a rotating micro-mirror with a vertical centerline and an axis of rotation both perpendicular to the surface, but not co-linear. The rotating micro-mirror is rotatable between a first position not in the first optical path and at least a second position redirecting the optical signal to one of the output optical fibers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.