Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
US6712681B1 · kind B1 · utility
8Cited by
4References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2000 |
| Grant date | Mar 30, 2004 |
| Priority date | — |
| Expiry date | Nov 20, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24D18/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers are embedded in the adjacent body of the polymer and fibers. The fibers may be separate, or in the form of a woven or non-woven web.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.