Self-aligned vertical combdrive actuator and method of fabrication
US6713367B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 27, 2002 |
| Grant date | Mar 30, 2004 |
| Priority date | — |
| Expiry date | Aug 27, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12145
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of fabricating a self-aligned vertical combdrive is described. The method includes the steps of etching in a semiconductor wafer a first comb with a coarse set of teeth. A second semiconductor wafer is bonded to the first set of teeth. A set of accurately positioned teeth is etched in the second wafer with teeth overlapping the teeth in the first comb. The lower teeth are etched using the overlapping teeth as a mask to assure proper alignment. One variation in this fabrication method whereby the first coarse comb teeth are etched on semiconductor-on-insulator instead, allows creation of double-sided comb actuators with increased torsional deflection range. Another variation to this fabrication method that keeps the electrically isolated upper masking teeth allows creation of dual-mode vertical comb actuators after an initial assembly step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.