Piezoelectric device with feedback sensor
US6713942B2 · kind B2 · utility
43Cited by
18References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 2001 |
| Grant date | Mar 30, 2004 |
| Priority date | — |
| Expiry date | Sep 14, 2021 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D33/00
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric device, such as a piezoelectric fan or microjet generator, for moving a fluid comprising a fluid-moving member having a first piezoelectric (PZT) actuator element coupled thereto to drive or actuate the movable member and a second piezoelectric (PZT) sensing element coupled thereto to provide feedback information related to fluid parameter. The second PZT element also can be used to drive the movable member in conjunction with the first PZT element. The feedback information can be used by a controller to control operation of the piezoelectric device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.