High temperature micro-machined valve
US6715733B2 · kind B2 · utility
25Cited by
6References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 8, 2001 |
| Grant date | Apr 6, 2004 |
| Priority date | — |
| Expiry date | Feb 14, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/0084
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Micro-valves that include a diaphragm capable of being positioned on a valve seat or removed from the valve seat. The micro-valves also include supports and a cover that restrict the motion of the diaphragm, thereby reducing the possibility of cracking. Micro-valves made by anodically bonding the diaphragm to a seat substrate and anodically bonding the cover to the diaphragm. Micro-injectors that include micro-valves. Also, methods of making the micro-valves and micro-injectors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.